Shanghai's largest integrated circuit industry investment project total investment of 38.7 billion, plans to produce 40,000 chips per month

[Shanghai's largest integrated circuit industry investment project with a total investment of 38.7 billion, plans to produce 40,000 chips per month] As the largest integrated circuit industry investment project in Shanghai, Huali 12-inch advanced production line has a total investment of 38.7 billion yuan. It is planned to end in 2022. A 12-inch integrated circuit chip production line with a monthly production capacity of 40,000 sheets was built.

Yesterday, in the southern district of Kangqiao Industrial Park in Pudong New Area, the 12-inch advanced production line construction project (hereinafter referred to as “Huahong Six Factory”) constructed and operated by Shanghai Huali Integrated Circuit Manufacturing Co., Ltd. under the Hua Hong Group, realized the first process equipment. - The moving of the lithography machine marked that Huahong No. 6 Plant had entered the installation and commissioning stage of the process equipment from the infrastructure phase.

Can produce 28 nanometer chips in Shanghai

Huali 12-inch IC project moved into the first device.

As the largest integrated circuit industry investment project in Shanghai, Huali 12-inch advanced production line has a total investment of 38.7 billion yuan. It plans to build a 12-inch 12-inch integrated circuit chip production line with monthly production capacity of 40,000 pieces by the end of 2022.

The progress of integrated circuit technology is generally measured by the two indicators of chip integration and micro-machining precision. The degree of chip integration refers to the number of transistors contained in a single chip. Wafer sizes have grown from 3 inches, 4 inches, 5 inches, 6 inches, and 8 inches to the current 12 inches, and 18 inches are also beginning to be in development. Judging from the current production capacity of global fabs, the 12-inch production line mainly produces high-performance products, and its process technology is more advanced. It is the current mainstream construction direction. ICInsights (Integrated Circuit Observation) analysis of the industry's leading consulting agency believes that as of the end of 2016, 300mm (12-inch) wafers accounted for 63.6% of the global fab capacity, and it is expected to reach 71.2% by the end of 2021. The compound annual growth rate was 8.1%.

Huali 12-inch advanced production line process covers 28-14 nanotechnology nodes. At present, the highest level of production of integrated circuits in the world has reached 7 nanometers, and the technical level of mainstream production lines is 28 to 14 nanometers. The highest level of production technology for integrated circuit companies in mainland China is 28 nanometers. Hua Hong Group previously had a fully automatic 12-inch chip production line, which is currently taking 55-28 nanometer technology. Compared with the first 12-inch production line, this project has improved both in terms of technical process and production capacity.

“The production capacity of 28-nanometer chips in mainland China is very small. After the capacity is built in the next 40,000 months, the production capacity of our 28-nanometer chips will double. At that time, some of the high-end chips we use will come from domestically produced products in Shanghai. 28-nanometer chip, which is of far-reaching significance for the development of China's integrated circuit industry.” Lei Haibo, president of Shanghai Huali Microelectronics Co., Ltd., said that the 28-nanometer chip has a wide range of applications, such as high-end chips for mobile communications, IoT, and artificial intelligence. . The project is mainly engaged in the production of logic chips. Based on this technology, it can develop many products such as radio frequency, high voltage, embedded memory chips, etc., focusing on the manufacture of advanced chips for domestic design companies, and meeting some issues concerning national information security. Focus on chip manufacturing needs.

Process equipment moved into the ceremony site.

Mainland's most advanced immersion lithography machine

The first process equipment imported this time was the NXT1980Di lithography machine of Asim Company of the Netherlands. It is currently the most advanced immersion lithography machine on the IC production line in China.

The lithography machine is one of the core equipments for chip manufacturing, and can be divided into a lithography machine for producing chips, a lithography machine for packaging, and a projection lithography machine for LED manufacturing. In the processing of the chip, the lithography machine transmits a beam of light through a series of light source energy and shape control means through a mask drawing a circuit diagram, compensates for various optical errors through the objective lens, and maps the line picture after being scaled down to Silicon wafers are then chemically developed to give a circuit diagram carved on the silicon wafer. Simply put, the pattern of the chip design is "transferred" from the reticle onto the photoresist coated on the surface of the wafer.

The move of the first process equipment of Huali 12-inch advanced production line construction project marks the staged victory of building the southern district of Kangqiao Industrial Park as a new base for the development of the Shanghai integrated circuit industry. This will promote the implementation of the national integrated circuit industry in Shanghai. The Outline, at the same time, is of great significance to Shanghai's construction of a high-level industrial cluster for advanced manufacturing, and the launch of the “Made in Shanghai” brand. In the next five months, the Huahong No. 6 Plant will be moved in a centralized manner, including some domestically-made equipment. By the end of this year, the production line will be completed and a trial film will be completed. The monthly production capacity is expected to reach 10,000.

Entered the forefront of the global integrated circuit industry camp

“It was a bit agitated and a little touched,” said Zhang Suxin, party secretary and chairman of the Hua Hong Group. Since the start of construction on December 30, 2016, the majority of builders have overcome unfavorable factors such as continuous rain and persistent high temperatures, and implemented three-dimensional and faulty construction. After about one and a half years of hard work, it has been working for more than 12 hours a day. At present, the main plant has been completely renovated and the relevant supporting mechanical and electrical equipment is ready. The conditions for the entry of the process equipment have been fulfilled, which is one and a half months ahead of schedule.

After the completion of the project, Hua Hong Group will become a large-scale integrated circuit manufacturing industry group with various process nodes ranging from 0.5 to 14 nanometers. It will enter the forefront of the global IC industry camp in terms of industrial scale and process technology. The project has been listed in the national "13th Five-Year Plan for the Planning of Major Productivity of the Industrial Productivity of the IC Industry" and is one of the sub-projects of the "910 Project" of the country. It is also a major industrial project of Shanghai during the "Thirteenth Five-Year Plan" period and major events in Shanghai. The project was completed and the project was started that year.