Shanghai Microsystems uses standard Si integrated circuit technology to achieve 150GHz oscillation signal

A few days ago, the Shanghai Institute of Microsystems and Information Technology, Chinese Academy of Sciences, the Internet of Things System Technology Laboratory used a 65nm standard Si CMOS process, and a single chip generated a millimeter wave signal above 100GHz. The French National Laboratory IEMN (Institute of Electronics, Microelectronics and Nano-electronics ) Test, the center frequency reaches 150GHz.

With the further narrowing of the line width of the CMOS device process line, the cut-off frequency of the CMOS device has reached hundreds of GHz or even approaching 1THz, plus the inherent high integration, low cost, low power consumption, and baseband module process inherent in the Si-based CMOS integrated process Compatible with other characteristics, the use of standard Si CMOS process design and implementation of low-cost, high-complexity single-chip millimeter wave integrated systems has become an international research hotspot. Compared with the 220GHz Si CMOS single-chip transceiver system completed by TI, NXP and other research institutions published abroad in June this year, there are only a few domestic research institutions engaged in related research, and the results have not been published yet.

The single-chip millimeter-wave system has high spatial resolution and large-bandwidth short-range wireless communication capabilities, as well as unique biological effects. Therefore, it is foreseeable that single-chip millimeter wave technology will have broad application prospects in the field of wireless sensor networks and medical electronics, especially MBAN and target detection, and is one of the core technologies for the further development of Internet of Things technology. Researcher Tian Tong of the Shanghai Institute of Microsystems and his research team, with the support of the five chambers, are taking this result as a starting point to carry out a comprehensive low-cost, highly integrated single-chip millimeter wave integrated system and related application technology research of Si CMOS technology. It is expected to be widely used in portable medical electronic equipment, human body parameter sensors, MBAN, Internet of Vehicles, motion detection technology, 3D wireless imaging technology and small target detection technology.

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